Products
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Products
|
Item |
National standard |
|
Sulfur hexafluoride(SF6) (volume fraction) /10-2 ≥ |
99.999 |
|
(Oxygen+argon) (O2+Ar) content (volume fraction) /10-6 ≤ |
2.0 |
|
Nitrogen (N2) content (volume fraction) /10-6 ≤ |
2.0 |
|
Carbon tetrafluoride(CF4) (volume fraction) /10-6 ≤ |
1.0 |
|
Carbon monoxide (CO) (volume fraction) /10-6 ≤ |
0.5 |
|
Carbon dioxide (CO2) (volume fraction) /10-6 ≤ |
0.5 |
|
Methane (CH4) (volume fraction) /10-6 ≤ |
0.5 |
|
Moisture (H2O) (volume fraction) /10-6 ≤ |
3.0 |
|
Mass fraction of acidity (HF) /10-6 ≤ |
0.1 |
|
Mass fraction of hydrolyzable fluoride (HF) /10-6 ≤ |
0.8 |
|
Comprehensive volume fraction of impurities/10-6 ≤ |
10 |
|
Particle |
Negotiable |